Adopted as the standard specification for CMP devices! High corrosion-resistant PFA coating that withstands harsh environments.
[Improvement of Equipment Reliability] Achieving both prevention of slurry adhesion and measures against chemical corrosion. Adopted as standard parts by equipment manufacturers! We accept prototypes and test construction.
In the design and development of advanced semiconductor manufacturing equipment, measures against chemical corrosion and the maintenance of cleanliness are the most critical design challenges that affect the reliability of the equipment. ■ Issues of slurry adhesion and corrosion resistance in the CMP process The head parts of CMP (Chemical Mechanical Polishing) equipment, which face the wafer at a close distance, are constantly exposed to splashes of slurry containing acids and alkalis, as well as intense corrosion stress, making it difficult to maintain long-term quality with simple water-repellent treatments. ■ PFA coating with fluoropolymer It possesses chemical stability that does not react with almost all chemical substances, completely preventing the leaching of impurities due to metal substrate corrosion. Additionally, due to its strong adhesion and uniform coating formation technology, it exhibits long-lasting corrosion resistance and non-stick properties even for complex-shaped parts. Its high reliability has been recognized, and it boasts a track record of being officially adopted as "standard specification parts" by equipment manufacturers. From head parts to surrounding covers and flow path components, it enhances the overall reliability of the equipment and enables differentiation.
- Company：日建塗装工業
- Price：Other
